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Publicaciones en revistas con arbitraje, dentro del SCI

Relacionadas con Elipsometría

Actualizada en mayo 2005


18.- Surface and Optical Analysis of SiCx films prepared by RF-RMS technique
A. Mahmood, S. Muhl, R. Machorro, A. Lousa, J. Esteve, and J. Heiras.
Con revisiones menores en la revista Diamond and Related Materials

17.- Optimal Control on Composition and optical properties of Silicon Oxynitride Thin Films
E. C. Samano, J. Camacho, and R. Machorro
J. Vacuum Science and Technology, enviado 1 oct 2004

16.- Characterization of Tungsten oxide films produced by reactive pulsed laser deposition
G. Soto, W. De la Cruz, J. A. Días, R. Machorro, F.F: Castillon, and M.H: Farias
Applied Surface Science 218, 281-289 (2003)

15.- Tungsten nitride films grown via pulsed laser deposition studied in sity by electron spectroscopies.
G. Soto, W. De la Cruz, F.F: Castillon, J. A. Días, R. Machorro, and M.H: Farias
Applied Surface Science, 214, Issues 1-4, 31, Pages 58-67, May 2003

14.- Optical and Surface Analysis of DC-Reactive Sputtered AlN Films
A. Mahmood, R. Machorro, S. Muhl, J. Heiras., F. Castillon, M. Farias, y E. Andrade
Diamond and related materials 12, 1315-1321 (2003)

13.- Growth of Beryllium nitride films by pulsed laser deposition
G. Soto, R. Machorro, J.A. Díaz, W. de la Cruz, and A. Reyes-Serrato
Thin Solid Films 434 (1-2): 7-13, 2003

12.- XPS, AES, and EELS study of the bondind character in CNx films
G. Soto, E.C. Samano, R. Machorro, F.F. Castillón, M.H. Farias, and L. Cota-Araiza
Superficies y Vacío, 15, 34-39 (2002)

11.- Beryllium nitride thin film grown by reactive laser ablation
G. Soto, J.A. Díaz, R. Machorro, A. Reyes-Serrato, and W. de la Cruz
Materials Letters 52, 29-33 (2002)

10.- Study of Composition and Bonding Character of and CNx Films
G. Soto, E. Samano, R. Machorro, L. Cota, and M. Farias
Applied Surface Science 183, 246-258 (2001)

9.- Beryllium nitride thin film growth by reactive laser ablation
G. Soto, J.A. Díaz, R. Machorro, and A. Reyes-Serrato
Materials letters 52, 29-33 (2001)

8.- Modification of refractive index in silicon oxynitrides films during deposition
R. Machorro, E.C. Samano, G.Soto, F. Villa and L. Cota-Araiza
Materials Letters 45, 47-50 (2000)

7.- Postdeposition annealing of ITO films produced by r.f. magnetron sputtering
M. Cruz-Jáuregui, J.M. Siqueiros, R. Machorro, and S. Wang
Superficies y Vacío 7, 47-50 (1998)

6.- In situ ellipsometric characterization of SiNx films grown by laser ablation
E.C. Samano, R. Machorro, G. Soto, and L. Cota
J. Appl. Phys., 84, 5296-5305 (1998)

5.- Growth of SiC and SiCxNy films by pulsed laser ablation of SiC in Ar and N2 enviroments.
G. Soto, E.C. Samano, R. Machorro and L. Cota
J. Vac. Sci. Technol., 16 (3), 1311-1315 (1998)

4.- Effects of backround gas-plume interaction in the deposition of SiNx films
E.C. Samano, Roberto Machorro, G. Soto and L. Cota
Appl. Sur. Sci, 127-129, 1005-1010 (1998)

3.- SiCxNy thin films alloys prepared by pulsed excimer laser deposition
Roberto Machorro, E.C. Samano, G. Soto and L. Cota
Appl. Sur. Sci, 127-129, 564-568 (1998)

2.- Ellipsometric study of the Cu/V/Mica system.
Jesus Siqueiros and Roberto Machorro
Rev. Mexicana de Física, 43, 1651 (1997)

1.- Characterizacion of excesss Si in Non-stochiometric SiO2 films by optical and surface analysis techniques
C. Falcony, W. Calleja, J.M. Siqueiros, R. Machorro, L. Cota Araiza, G. Soto y M.H. Farias
J. of Electrochemical Soc. 144, 379 (1997)



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